PRODUCT
AUTO TYPE
TM5-5500
TM5-5500
Full-Automatic Thin Film Measurement System
Fully Automated Measurement for Production Environments
TM5-5500은 Full-Automatic Motion을 지원하는 생산·검사 환경용 Thin Film Measurement System입니다.
FOUP 및 Ellipsometer Option을 통해 자동화된 공정 환경에 맞춘 구성이 가능합니다.
Specification
| Wavelength | : 350 – 900 nm |
| Measurement Range | : 100 Å – 100 μm* |
| Spot Size | : 40 / 20 μm |
| Stage Size | : Up to 300 × 300 mm |
| Motion | : Full-Auto |
| Option | : FOUP / Ellipsometer |
* Measurement range depends on material.